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Evaporation source cluster

Bestec designs and provides different type of customized and high vacuum (HV) or ultra high vacuum (UHV) compatible evaporation source assamblies to be integrated in a Bestec deposition system or as separate component.

Typical design parameters

  • Flanges with one or multiple evaporation sources mounted.
  • All assemblies are at least HV compatible (most of them even UHV compatible).
  • Wide range of different evaporation techniques possible.
    • E.g. E-Beam evaporation, thermal evaporation, organic evaporation (OLED sources), Effussion cells etc.
  • Full software control possible via attached controllers.


  • Integration of pneumatic or motorized shutter possible.
  • Combination of different kind of sources at one cluster flange.