P393 – Exit Slit Unit ESM (P-branch) NSLS-II
Application
Exit slit unit for soft X-ray synchrotron radiation
Year of delivery
2015
Installation site
ESM beamline at synchrotron radiation source NSLS-II, USA
Design Features
-
Double slit mechanism – vertically and horizontally defining slits.
- Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.
- OFHC slit blades.
-
Manual slit unit translation along beam axis.
- Isolated bias plate with phosphorus screen.
- Photodiode behind vertically defining slit.
- Adjustable support structure.
Performance Features
- Precision and slit opening repeatability smaller than 100 nm.
- Parallelism smaller than 0.8 µm over 10 mm edge length.
- Straightness smaller than 0.5 µm over 10 mm edgle length.
- Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.
Outer Dimensions
Technical specifications and performance values
Chamber type
cylindrical, horizontal axis
Main flanges
DN160CF cluster flanges
Material
1.4301
Base pressure
10-10 mbar range
Range
± 100 mm
Height
± 5 mm
Lateral
± 5 mm
Longitudinal
± 5 mm
Yaw
± 1°
Material
OFHC
Straightness
< 0.15 µm over 10 mm (1σ)
Parallelism
0.04 µm /mm
(10 µm slit opening)
-0.04 µm /mm
(25 µm slit opening)
-0.05 µm /mm
(50 µm slit opening)
Range
4.8 µm to 9.4 mm
Repeatability
± 0.03 µm
(up to 400 µm slit opening)
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Material
OFHC
Straightness
< 0.15 µm over 10 mm (1σ)
Parallelism
0.07 µm /mm
(10 µm slit opening)
0.06 µm /mm
(25 µm slit opening)
0.02 µm /mm
(50 µm slit opening)
Range
4 µm to 9.6 mm
Repeatability
± 0.03 µm
(up to 350 µm slit opening)
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count