P384 – 2″ UHV sputter deposition University Bielefeld
Application
UHV sputter deposition system for thin film and multilayer deposition at 2″ substrates
Year of delivery
2014
Installation site
University Bielefeld, Germany
Design Features
- UHV magnetron sputter deposition system with confocal sputter up configuration.
- Up to four 2″ magnetrons with manual in situ tilting.
- All magnetrons with easy changeable magnetic system for use with ferromagentic or non-ferromagnetic target materials.
- Fully motorized 2 axes sample manipulator with integrated sample shutter, DC Bias potential option and maximal sample temperature well above 800°C.
- Moveable thickness monitor for sputter rate measurement before starting a deposition process.
- Integrated bake out system.
- Load lock chamber with storage and lamp heating option.
Special Features
- System is prepared to be added to a cluster tool via second transfer port at load lock chamber.
- Different sample sizes from 2″ wafer down to 10mm x 10mm samples can be handled (using different kind of sample adapters).
Outer Dimensions
Technical specifications and performance values
General
Sputtering chamber
Size
400 mm diameter, about 710 mm height
Material
stainless steel
Load lock chamber
Size
150 mm diameter, about 300 mm height
Material
stainless steel
Vacuum
Sputtering chamber
Base pressure
< 2 *10-9 mbar
Pump down time
1.25 hours to < 10-7 mbar
Chamber pumping
Turbo pumping stage, chamber lid differentially pumped by dry foreline pump
Bake out
< 150°C
Load lock chamber
Base pressure
< 10-7 mbar
Pump down time
3/4 hours to < 10-6 mbar
Chamber pumping
Turbo pumping stage with dry foreline pump
Manipulator features
Sputtering chamber
Sample size
diameter max. 2″ substrate
Motion axes
2 motorized axes (manipulator z translation and (continous) rotation of the sample stage)
Pneumatic sample shutter (part of the manipulator head)
Temperatures
Room temperature (not stabilized) up to 950°C at sample
Special features
DC bias potential option
Load lock chamber
(Sample storage)
Storage size
6 sample holders
Sample size
diameter max. 2″ substrate
Motion axes
2 manual axes (rotation, z tranlsation)
Rotation axis equipped with an air side idexer plate for easy and fast sample loading via access door or transfer rod
Performance test results
Chamber pump down
Long time sample heating
